A Systematic Approach to Macromodeling Complex MEMS Devices

摘要

This paper describes a systematic approach to lumped-constant modeling of arbitrary MEMS devices based on the concept of element stamps. In particular, it is shown that stamps can be used to represent the dynamical behavior of micro-electromechanical elements whose motion is restricted by arbitrary ideal constraints. Since many MEMS structures are built from a common set of basic elements, such as beams, anchors and plates, this approach allows the systematic development of models for a large variety of MEMS components, and their seamless integration into simulators capable of handling indifferently mechanical, electrical or electromechanical devices. As a practical application example, the stamp describing the dynamical model of a planetary electrostatic motor is derived, and numerical results obtained from the simulation of this model are presented.