Synthesis and characterization of Ti_2AlC and Ti_2AlN MAX phase coatings manufactured in an industrial-size coater

摘要

Due to a nanolaminate structure, MAX phases are materials with an interesting set of properties. The present paper is focussed on the synthesis and characterization of Ti_2AlC and Ti_2AlN MAX phase coatings. They were deposited by dc magnetron sputtering from single elemental Ti, Al, and C targets (Ti-Al-C system); in addition to Ti and Al, nitrogen was used for the Ti-Al-N system. XRD analysis revealed the growth of cubic Ti_3AlC and Ti_3AlN perovskite phases in the coatings deposited at 540°C. After coating deposition an annealing treatment at 800, 1000 and 1200°C was carried out. The results indicate that annealing for 1 h in vacuum at 800°C enhances crystallization of the Ti_2AlN and Ti_2AlC MAX phases. It was also observed that annealing at temperatures higher than 1000°C enhances the decomposition of both phases, Ti_2AlC and Ti_2AlN, and gives rise to the formation of the carbide and nitride phases TiC_x and TiN_x, respectively.