Deposition of LiNbO_(3) waveguide by pulsed-laser deposition

摘要

LiNbO_(3) thin films were deposited by pulsed-laser deposition (PLD) method. Crystalline and transparent films were deposited on sapphire substrates at 400°C and in 100 mtorr of oxygen gas pressure. The waveguide properties, which were waveguide mode and loss, were measured by prism coupling method. Droplet less film was obtained with low ablation laser fluence and without scanning of ablation laser. The smallest waveguide loss was 32.9 dB/cm at present.