ELECTRON-BEAM VAPOR DEPOSITION DEVICE, DEVICE FOR PRODUCING QUARTZ OPTICAL WAVEGUIDE UTILIZING THE DEPOSITION DEVICE AND PRODUCTION THEREOF

摘要

PURPOSE: To provide an electron-beam vapor deposition device for producing a highly-reliable, low-loss and inexpensive quartz optical waveguide and to furnish the method for producing the waveguide utilizing the device. ;CONSTITUTION: This electron-beam vapor deposition device has an electron gun 13 and a holder 17 for holding a substrate 15, on which a material 12 vaporized by the gun 13 is deposited, in a vacuum chamber 11, and an electric heater 18 is joined to the holder 17. The device for producing a quartz optical waveguide has the electron gun 13, and the holder 17 to hold a substrate also used as an underclad and on which the material 12 vaporized by the gun 13 is deposited or the holder 15 on which an underclad is formed in the chamber 11, and the heater 18 is joined to the holder 17. The waveguide is produced as follows. Namely, the substrate 15 is heated to 600°C, above the softening temp. of the substrate 15 or below the m.p. of the substrate 15 by the heater 17 joined to the holder 17, and the core material. 12 vaporized by the gun 13 in the chamber 11 is deposited on the substrate 15.;COPYRIGHT: (C)1995,JPO