Understanding of chemical corrosion resistance of aluminum nitride (AlN) ceramics is strongly desired for their applications as structural parts in semi-conductor process. However, there is not enough information on the chemical corrosion. Two kinds of commercial AlN ceramics with high thermal conductivity of 170 and 200W/mK. were examined in acids and basic aqueous solutions such as KOH, NaOH, HNO{sub}3 and H{sub}2SO{sub}4 with different concentration. Weight changes, phases present and microstructures on the surfaces before and after testing were evaluated. As a result, basic aqueous solutions exactly corroded AlN ceramics in comparison with acid aqueous solutions. Although secondary phases, such as yttrium aluminate, were mainly dissolved in the case of acid aqueous solutions, AlN itself was corroded into basic aqueous solutions. Furthermore, it was observed that weight loss of AlN ceramics with higher thermal conductivity was larger than that of lower thermal conductivity. It seems that oxygen content dissolved into AlN grain has a influence on corrosion of AlN ceramics.
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