Epitaxial metallic electrodes, quantum dots and wires for application in solid-state qubit technology

摘要

A road map for the fabrication of epitaxial metallic electrodes, quantum dots and wires is considered for potential application in solid-state qubit technology. The nanotecthology developed includes high quality low-roughness film epitaxy, probe lithography and subtractive techniques for the fabrication of epitaxial nanostructures with a lateral resolution down to 10 nm.