Effect of Operating Parameters on the Performance of ZSM-5 Zeolite Honeycomb Rotor for VOCs Treatment

摘要

The characteristics of exhaust gas from semiconductor manufactures are high-flow, low concentration and varying contents of VOCs. The main VOCs are IPA and Acetone from washing process as well as PGME and PGMEA from photo resist process. The rotary zeolite concentrator combined with oxidation process is one of the most popular technologies proven to be applicable for effective control of VOCs from semiconductor's waste gas. This paper discusses the impacts of operating parameters and inlet conditions on the performance of the concentrator Removal efficiencies of various VOCs (IPA, Acetone, PGME and PGMEA etc.) by the concentrator were examined and presented. The investigated operating parameters and inlet conditions include regeneration temperature, rotation speed, concentration ratio, inlet flow temperature, humidity as well as different types and concentrations of VOCs.