Precise positioning systems are very important in high-precision processing technology such as semi conductor manufacturing equipments. In this region electro-motion systems are widely used, but the heat from the motor inhibits the controllability of the system. On the other hand pneumatic servo systems have advantages of low heat generation. To improve the controllability of pneumatic servo table, the improvement of the servo valve is essential. We developed a pneumatic precise position controllable servo valve. The aim of this valve is to improve the dynamic characteristics and the flowrate controllability. The spool of this valve was realized completely non-contact by air bearing. Therefore, the position resolution of this valve is greatly improved compared with the commercially available one. By using this valve to control the pneumatic servo table system, the trajectory controllability is greatly improved.
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