Integrated Control Design of Pneumatic Servo Table Considering the Dynamics of Pipelines and Servo Valve

摘要

In this paper, integrated control design for the pneu matic servo table system considering the dynamics of pipelines and servo valve is studied. The table is mainly composed by a pneumatic actuator, a high performance pneumatic servo valve and pipelines. The pneumatic actuator utilizes a pneumatic cylinder with air bearings. The servo valve has high dynam ics up to 300 Hz and is connected to the pneumatic actuator by pipelines. The system is pneumatically driven, providing the advantages of low heat genera tion and non-magnetic, nature suited to precise posi tioning. To simulate the system, we designed a linear model considering pipelines and servo valve dynamics. Comparison results showed that with a 7~th order lin ear model, the discrepancy between experiment and simulation results was much smaller than when using a 3~rd order model. The model's complexity made it necessary to reduce the model's order. Two poles are much further from the imaginary axis compared with other five poles in the pole loci of the 7~th order model, so the model is reduced to a 5~th order. A comparison of simulation and experiment results showed that the 5~th order model matches the real system well.