A comparision of electron emission performance of vapor deposited carbide

摘要

We report on fabrication and emission performance of vapor deposited field emitter arrays. The aim of this research is to investigate optimum materials for use in poor vacuum conditions commonly found in commercial devices and to increase emission stability for a variety of uses for which this is a demand. Initially we considered three potential types of materials for use as the emitter surface; one resistant to sputter damage caused by elevated pressures, a second inert to oxidation common in ambient device atmospheres, and third a material such as a conducting oxide. Previous studies[1,2] served to eliminate the third possibility due to surface instabilities. Most of our efforts historically have focused on the first area represented by the transition metal carbides but we have recently tried one material from the second area, platinum.