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Titanium carbide coatings deposited by reactive ion beam-assisted, electron beam-physical vapor deposition

机译:反应离子束辅助,电子束物理气相沉积沉积的碳化钛涂层

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Titanium carbide (TiC), in addition to other transition metal carbides, has excellent wear-resistant properties in machining of stainless and high speed tool steels. TiC was successfully deposited on 304 stainless steel by reactive ion beam-assisted electron beam-physical vapor deposition (RIBA, EB-PVD). The hardness values ranged from 1100 to 3500 VHN{sub}0.050 depending on the processing parameters. The surface morphology and degree of texturing were correlated with the processing conditions. Ion bombardment resulted in strong surface and growth texture in primarily the (111) orientation. A change from the (111) orientation to the (200) was observed at high substrate temperatures. Vickers hardness, scanning electron microscopy (SEM), X-ray diffraction (XRD) and electron probe microanalysis (EPMA) were used to characterize these films.
机译:除其他过渡金属碳化物外,碳化钛(TiC)在加工不锈钢和高速工具钢时还具有出色的耐磨性。 TiC通过反应离子束辅助电子束物理气相沉积(RIBA,EB-PVD)成功沉积在304不锈钢上。取决于加工参数,硬度值的范围为1100至3500 VHN {sub} 0.050。表面形态和织构程度与加工条件有关。离子轰击主要在(111)方向上产生了较强的表面和生长纹理。在高基板温度下观察到从(111)取向向(200)的变化。使用维氏硬度,扫描电子显微镜(SEM),X射线衍射(XRD)和电子探针显微分析(EPMA)来表征这些薄膜。

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