Thin-film superlattice thermoelectric material was used to fabricate 2-inch wafer scale thermoelectric module arrays. These arrays employ a promising thermoelectric device technology that exhibits a significant enhancement in the thermoelectric device figure of merit (ZT) at 300 K, cooling/heating power densities in excess of 100 Watts/cm{sup}2 and response times significantly faster than bulk devices. To power and characterize these devices, we have developed a high-speed computer controlled multi-channel power supply with integrated real-time infrared imaging. This system allows creation of individual temperature control profiles, and exploits the rapid response time of the thin-film device. Using this system, we demonstrate high-speed operation and compare the response times of bulk and thin-film devices in the same format. Finally, applications of thin-film thermoelectric arrays are considered.
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机译:薄膜超晶格热电材料用于制造2英寸晶片秤热电模块阵列。这些阵列采用有希望的热电装置技术,其在300k的优点(ZT)的热电装置形象中具有显着增强,冷却/加热功率密度超过100瓦/ cm {sup} 2,并且响应时间明显快于散装设备。为了电源和表征这些设备,我们开发了一种高速计算机控制的多通道电源,具有集成的实时红外成像。该系统允许创建各个温度控制轮廓,并利用薄膜装置的快速响应时间。使用此系统,我们展示了高速操作,并以相同格式比较了批量和薄膜设备的响应时间。最后,考虑了薄膜热电阵列的应用。
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