A novel technique for the determination of the intensity distribution of the focal spot of a microfocus X-ray tube is presented. An image of the focal spot is derived by evaluation of a projection image of a suitable test pattern using a standard image deconvolution algorithm. Using this method, the intensity distribution of focal spots with a spatial extent of a few micrometers can be measured. After an overview of existing methods and a discussion of mathematical foundations, the theoretical background of the novel approach is outlined, possible sources of error are discussed and first measurement results are presented which were acquired under normal industrial measurement conditions showing the intensity distribution of a focal spot with a spatial extent of a few microns.
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