Laboratory X-Ray Nano-CT System

摘要

Using advanced X-ray technologies and X-ray scattering enhancement in signal detection, a compact laboratory X-ray scanner for 3D non-invasive imaging with 150-200 nanometers 3D detail detectability has been created. This spatial resolution in the volume terms is equal or better than can be achieved in synchrotron tomography, 5 orders better than in existing laboratory instruments and 10-12 orders better in comparison to clinical CT. The instrument is built using X-ray source with LaB6 cathode and two electromagnetic lenses. Small-angle scattering enhances the object details up to 150-200 nm. An object manipulator allows precision positioning and rotation with accuracy better than 100 nm. The X-ray detector is based on an intensified CCD with single photon sensitivity. The typical acquisition cycle for 3D reconstruction of the full object volume takes from 15 to 100 minutes with collection of several hundreds angular views. Subsequent volumetric reconstruction produces results as a set of virtual slices with isotropic voxel size up to 150 × 150 × 150 nm or as a 3D-model, which can be virtually manipulated and measured. The object stays in normal environmental conditions without any coating, vacuum treatment or other preparation. Unique spatial resolution in non-invasive 3D-investigation allows obtaining heretofore unachievable 3D images in the wide range of application areas, such as composite materials, carbon-based materials, fuel cells, paper and wood microstructure, biomedical applications, etc.