The pad life performance study of WCMP process

机译：WCMP过程的垫寿命性能研究

获取原文

页面导航

摘要
著录项
相似文献
相关主题

摘要

Politex Pad is widely used in WCMP process. Due to the poor quality control issue of politex pad and slurry blocking effect, it is difficult to estimate and control the pad life. To solve this problem, we have monitored the pad life for a long time (about 1000 hours) and developed a methodology to check the pad life. Using the new methodology, the reasonable pad life can be predicted.

机译：Politex Pad广泛用于WCMP过程。由于Politex垫的质量控制差和浆料阻塞效果，难以估计和控制垫寿命。为了解决这个问题，我们已经监控了垫寿命长期（约1000小时）并开发出一种检查垫寿命的方法。使用新方法，可以预测合理的垫寿命。

著录项

来源
《Chemical-Mechanical Planarization for ULSI Multilevel Interconnection Conference》|2002年||共3页
会议地点
作者
Pao Kang Niu; Shui-Hung Chen; Mu-Chi Chiang; S. N. Peng; S. C. Wang;
展开▼
作者单位

展开▼
会议组织
原文格式 PDF
正文语种
中图分类 TN47-53;
关键词

相似文献

外文文献
中文文献
专利

1. Semantic-based padding in convolutional neural networks for improving the performance in natural language processing. A case of study in sentiment analysis [J] . Gimenez Maite, Palanca Javier, Botti Vicent Neurocomputing . 2020,第Feba22期

机译：卷积神经网络中基于语义的填充，用于提高自然语言处理中的性能。情感分析研究案例
2. Study On The Optimization Of TheTextile Coloristic Performance Of The Bleaching Process Using Pad-Steam [J] . C. Tavares, F.J.G. Silva, A.I. Correia, Procedia Manufacturing . 2018,第3期

机译：垫蒸汽法优化漂白过程中纺织品色泽性能的研究
3. Study On The Optimization Of TheTextile Coloristic Performance Of The Bleaching Process Using Pad-Steam [J] . C. Tavares, F.J.G. Silva, A.I. Correia, Procedia Manufacturing . 2018,第4期

机译：垫蒸汽法优化漂白过程中纺织品色泽性能的研究
4. The pad life performance study of WCMP process [C] . Pao Kang Niu, Shui-Hung Chen, Mu-Chi Chiang, Chemical-Mechanical Planarization for ULSI Multilevel Interconnection Conference . 2002

机译：WCMP过程的垫寿命性能研究
5. A STUDY OF THE KINETICS OF COLD PAD BATCH DYEING WITH FIBER REACTIVE DYES USING HIGH PERFORMANCE LIQUID CHROMATOGRAPHY. [D] . COTE, LINDA GAY. 1986

机译：高效液相色谱法研究纤维活性染料对冷轧纸浆的染色动力学。
6. Sensory Processing Functional Performance and Quality of Life in Unilateral Cerebral Palsy Children: A Cross-Sectional Study [O] . Patricia Jovellar-Isiegas, Inés Resa Collados, Diego Jaén-Carrillo, 2020

机译：单侧脑瘫儿童的感官加工功能性能和生活质量：横截面研究
7. INTRODUCTION After fourteen years of pioneering systematic work spanning from 1996 to 2010, carried out in the territory of Santa Catarina State, SC, within the Brazilian Southern region, framed in the socalled Atlantic Slope of the Southern Cone of South America (Agudo-Padrón, 2008a), a basic list of continental (land and freshwater) and marine mollusc species was compiled. Besides constant interactions and consultations with numerous national and international specialists, such a list was mostly based on available literature and/or analyses of voucher specimens deposited in collections belonging to research centers or environmental education institutes. To date (up to the first semester of 2010), this list comprises a total of 878 taxa (species and subspecies, including 695 marine and 183 continental forms), and these numbers are likely to increase as field surveys ensue. In the present study, results obtained from the author’s active participation in three recent regional field sampling expeditions dealing with marine and continental mollusc taxa, are reported. I. Official State program for listing and control of invasive exotic species Starting from November 2009, and for the first time in the history of Santa Catarina State, the presence of invasive allochthonous mollusc species in Santa Catarina State was studied and discussed through the organisation of seminars by the Official Foundation for the Environment of the State of Santa Catarina (Fundação do Meio Ambiente – FATMA) jointly with the Hórus Institute for Development and Environmental Conservation (Instituto Hórus de Desenvolvimento e Conservação Ambiental), with the main goal to compile the Official State List of Species. To date, the occurrence of a total of twenty allochthonous (exotic) forms of mollusc species has been confirmed, 14 Gastropoda and 6 Bivalvia namely, 11 terrestrial gastropods, 5 freshwater taxa (3 gastropods and 2 bivalves) and 4 marine bivalves. Taking into account the contributions of Agudo Bleicker (2006a), Agudo-Padrón (2008b) and Agudo-Padrón Lenhard (2010), the slug Pallifera sp. - the taxonomic determination of which is still in process (Thomé et al., 2006) - was included within such a list. Of these twenty Mollusca and environmental conservation in Santa Catarina State (SC, Southern Brazil): current situation [O] . A. Ignacio Agudo-Padrón 2011

机译：引言经过十四年的开展系统工作，从1996年到2010年，在南卡罗来纳州南卡罗来纳州圣卡塔琳娜州境内开展，在南美洲南锥体所谓的大西洋坡（agudo-padrón， 2008a），编制了大陆（陆地和淡水）和海洋软体动物物种的基本清单。除了与众多国家和国际专家不断互动和协商之外，这样的清单主要基于现有文献和/或存放在属于研究中心或环境教育机构的馆藏中的凭证标本的分析。到目前为止（截至2010年第一季度），该清单共包括878个分类群（物种和亚种，包括695种海洋和183种大陆形式），随着实地调查的发生，这些数字可能会增加。在本研究中，报告了作者积极参与最近三次涉及海洋和大陆软体动物类群的区域野外抽样考察的结果。 I.列入和控制外来入侵物种的官方国家方案从2009年11月开始，圣卡塔琳娜州历史上第一次通过组织“圣卡塔琳娜州”对圣卡塔琳娜州的入侵性异地软体动物物种的存在进行了研究和讨论。由圣卡塔琳娜州官方基金会（Fundaçãomomeio ambiente - FaTma）与Hórus发展与环境保护研究所（InstitutoHórusdeDesenvolvimento eConservaçãoambiental）联合举办的研讨会，主要目标是编制官方州物种清单。到目前为止，已确认共发生了20种异地（外来）形式的软体动物物种，14种腹足纲和6种双壳纲即11种陆生腹足类动物，5种淡水类群（3种腹足动物和2种双壳类动物）和4种海洋双壳类动物。考虑到agudo＆Bleicker（2006a），agudo-padrón（2008b）和agudo-padrón＆Lenhard（2010）的贡献，pallifera sp。 - 其中的分类学决定仍在进行中（Thomé等，2006） - 被列入此类清单。在圣卡塔琳娜州（sC，巴西南部）的这20个软体动物和环境保护中：当前的情况

The pad life performance study of WCMP process

摘要

著录项

相似文献

相关主题

期刊订阅