A MULTILAYER MICROELECTRODE ARRAY FOR PARTICLE SEPARATION BY DIELECTROPHORESIS

摘要

This paper focuses on the use of dielectrophoresis (DEP) for particle separation. Our purpose is to design a chip that enables the manipulation of thousands of particles at the same time, using a large 2D-microelectrode array. Several electrode shapes were designed with the goal of obtaining high field gradients and ensuring a good separation between the locations of the field maxima and minima, where the particles are respectively directed under positive and negative DEP. Two different microsystem designs have been tested. The first structure is composed of two interdigitated networks of tip electrodes. The second structure is multilayer and arrays a set of electrodes producing a quadrupole field.