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A new multiple chemical pretreatment for fabrication of high quality CVD diamond-coated drills

机译:一种新的多种化学预处理,用于制备高质量CVD金刚石涂层钻头

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Because of its extreme hardness, wear resistance, good thermal conductivity and low thermal expansion coefficients, a diamond tool exhibits a range of properties which makes it a key and unique component in many fields of mechanical engineering. In comparison with the other types of diamond tools, the thin film diamond-coated cutting inserts have great potentialities in the commercial application because of its low costs for fabrication equipment and high performance. Thus, they are on the verge of becoming the next generation of tools used for high speed machining non-ferrous metals and alloys, metal-compound materials, and hard brittle non-metals. However, the poor adhesion of the diamond film on the substrate becomes the main technical barriers for the successful development and commercialization of diamond-coated tools. In this paper, diamond thin films were deposited on WC-Co cemented carbide substrates by the electron aided hot filament chemical vapor deposition (EACVD), using a mixture of hydrogen and acetone as source gases. A new multiple chemical pre-treatment including microwave oxidation, reaction in alkaline solution and cleaning by ultrasonic treatment in acid solution has been performed for free shape cemented WC-Co drills in order to increase the diamond nucleation and to enhance the coating adhesion. And also, another new pretreatment method using Ar-H{sub}2 gas etching decarburization by microwave plasma is performed for the WC-Co substrate surface. The influences of this pretreatment technique on the adhesion strength, diamond nucleation and surface morphology of the diamond thin film are investigated. Scanning electron microscope (SEM) was used to view the substrate morphology, and to examine the cobalt removal. After pre-treatment, the surface of the WC-Co substrate becomes slightly rough, but its composition and structure shows no changes identified by X-ray diffraction (XRD). Scanning electron microscope (SEM) indicates a distribution of uniform micro-roughness WC grains on substrate surface. And also the research results show that the pretreatment using Ar-H{sub}2 etching decarburization by microwave plasma is an effective method to enhance adhesive strength. The appropriate CVD processes were studied for the fabrication of tools with complex geometries. An adequate amount of additive can effectively prevent the overflow of Co from inner to surface of the substrate and avoid the catalytic effect of Co during CVD. The smooth diamond film with low surface roughness can be deposited by increasing the carbon source concentration and reducing the reactive pressure at the later stage of CVD process. The diamond morphology quality and homogeneity of coatings were characterized by SEM and Raman spectroscopy. The cutting performances of diamond-coated tools were studied by the cutting tests of difficult-to-machine materials. The research results show that the high quality diamond coating has been deposited on complex shape substrates for WC-Co cemented carbide twist drills. The cutting performances of diamond-coated drills are improved further by the new pretreatment and CVD process. It is of great significance for the fabrication and application of the diamond-coated tools with complex geometries.
机译:由于其极端硬度,耐磨性,良好的导热性和低热膨胀系数,金刚石工具表现出一系列性质,这使得它成为机械工程的许多领域中的钥匙和独特的部件。与其他类型的金刚石工具相比,由于制造设备的低成本和高性能,薄膜金刚石涂覆的切削刀片具有很大的潜力。因此,它们是成为高速加工有色金属和合金,金属化合物材料和硬脆性非金属的下一代工具。然而,金刚石薄膜对基板上的粘附性差成为钻石涂层工具成功开发和商业化的主要技术障碍。在本文中,使用氢和丙酮作为源气体的混合物,通过电子辅助热丝化学气相沉积(EACVD)在WC-Co硬质合金基板上沉积金刚石薄膜。已经进行了一种新的多种化学预处理,包括微波氧化,碱性溶液反应和通过在酸溶液中的超声处理清洁,用于自由形状的WC-CO钻头,以增加金刚石成核并增强涂层粘附性。而且,对使用微波等离子体的AR-H {Sub} 2气体蚀刻脱碳的另一种新的预处理方法是针对WC-Co衬底表面进行的。研究了这种预处理技术对金刚石薄膜的粘合强度,金刚石成核和表面形态的影响。扫描电子显微镜(SEM)用于观察底物形态,并检查钴去除。在预处理后,WC-Co底物的表面变得略微粗糙,但其组成和结构显示出通过X射线衍射(XRD)鉴定的任何变化。扫描电子显微镜(SEM)表示衬底表面上均匀微粗糙度Wc颗粒的分布。研究结果表明,使用微波等离子体使用Ar-H {Sub} 2蚀刻脱碳的预处理是增强粘合强度的有效方法。研究了适当的CVD方法,用于制造具有复杂几何形状的工具。足够的添加剂可以有效地防止基材内表面的CO溢出,并避免CO期间CO的催化作用。通过增加碳源浓度并降低CVD工艺后期阶段的碳源浓度并降低反应性压力,可以沉积具有低表面粗糙度的光滑金刚石膜。涂料的金刚石形态质量和均匀性的特征在于SEM和拉曼光谱。通过难以机材料的切削测试研究了金刚石涂层工具的切割性能。研究结果表明,高质量的金刚石涂层已沉积在WC-Co硬质合金扭曲钻头的复杂形状底物上。通过新的预处理和CVD工艺进一步提高了金刚石涂层的切割性能。对于具有复杂几何形状的金刚石涂层工具的制造和应用具有重要意义。

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