Miniature Electro discharge machine for high precision micro-structurisation

摘要

In this paper, we first discuss the general concepts of the Micro/Nanofactory as promoted at IPR. Then we present a miniature electro discharge machine being developed at EPFL in cooperation with the companies AGIE, ETA and HEIDENHAIN. The machine is named Delta Cube II. It has a working volume of 4~*4~*4 mm~3, a high resolution (5nm) and a high bandwidth dynamic (300 Hz). These performances are made possible by using a parallel mechanisms based on flexure joints, thus completely eliminating friction and backlash. Three moving magnet motors actuate the machine. The special features of the Delta Cube II permit to explore new strategies for micro-EDM structurisation. The gap (distance between work piece and electrode) can be controlled accurately improving the quality, the accuracy and the velocity of the machining. With new erosion strategies based on those performances, we expect to erode small pieces with a precision of 100nm , which means 5 times better than the actual state of the art of the. EDM machines on the market. The small overall size of the Delta Cube II makes it ideal to be used in a Microfactoty.