FABRICATION OF ALUMINUM ELECTRODES FOR GLASS-AND POLYMER-BASED MICROFACTORIES BY A SIMPLE, LOW-POWER LASER-ASSISTED CORROSION PROCESS

摘要

Fabrication of aluminum electrodes on glass, poly(dimethylsiloxane) and SU-8 by a simple and inexpensive process based on low-power laser-thermal corrosion in water is presented. Rapid prototyping and testing of an asymmetric electrohydrodynamic pump is shown, taking advantage of the high flexibility of this lithography scheme.