The rapid growth of Taiwan's semiconductor industry and related R&D activities will be reviewed from a historical perspective. We will examine the infrastructure that has developed, and identify the chain of events that have given birth to the emerging enterprises. The strength and weakness of Taiwan vis-a-vis global competitors will be examined. Taiwan's universities, national laboratories, and industrial sector have been jointly supporting the R&D activities, including the developments of new processing and plasma etching technologies. Finally, recent achievements and future directions for the industry in the new millennium will also be presented.
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