首页> 外文会议>IEEE Sensors >A Micromachined Self-Resonant Frequency-Modulated Passive Pressure Transensor
【24h】

A Micromachined Self-Resonant Frequency-Modulated Passive Pressure Transensor

机译:微机械的自谐振频频率调制被动压力转换转变

获取原文

摘要

In this paper, we report on the design, fabrication and testing of a passive pressure transensor. The sensor uses the self-resonant frequency modulation of an integrated coil to detect the pressure variations. This modulation is generated by the displacement of a ferrite core attached to a silicone rubber membrane relative to the coil. This scheme simplifies the packaging of the passive transensor by removing the requirement for a separate capacitor to form the resonator. A 1.37μH coil having a dimension of 3mm×3mm and 30 turns is used in a prototype design yielding a sensitivity of 34.7 kHz/kPa with a cylindrical ferrite core of 9.5mm diameter and 0.5mm height.
机译:在本文中,我们报告了无源压力转换器的设计,制造和测试。传感器使用集成线圈的自谐振频调制来检测压力变化。该调制由相对于线圈的硅橡胶膜附着到硅橡胶膜的铁氧体芯的位移产生。该方案通过去除单独电容器以形成谐振器来简化无源转换的封装。在原型设计中使用尺寸为3mm×3mm和30匝的1.37μH线圈,产生34.7kHz / KPA的灵敏度,圆柱形铁氧体核心为9.5mm,高度为0.5mm。

著录项

相似文献

  • 外文文献
  • 中文文献
  • 专利
获取原文

客服邮箱:kefu@zhangqiaokeyan.com

京公网安备:11010802029741号 ICP备案号:京ICP备15016152号-6 六维联合信息科技 (北京) 有限公司©版权所有
  • 客服微信

  • 服务号