A COMPACT X-RAY SPECTROMETER WITH MULTI-CAPILLARY X-RAY LENS AND FLAT CRYSTALS

摘要

We present a new type of wavelength dispersive x-ray spectrometer with a multi-capillary x-ray lens. This spectrometer has a simple and compact construction with good performance for small area analysis. A multi-capillary x-ray lens, a device that collects fluorescent x-rays from a selected sample area of diameter 0.1 mm or less and collimates them into a nearly-parallel beam form, was combined with conventional flat crystals. The flat crystal and an x-ray detector were set on a θ-2θ simple goniometer. The result of [Cu K-emission source / LiF flat crystal / Fe Kα line from stainless sheet sample] is as follows: the Fe Kα intensity from a 0.1 mm area is 130 times higher than a conventional XRF spectrometer and the intensity from a 0.05 mm is 270 times higher. The FWHM of the FeKα line is 0.012 A. These results indicate solid feasibility of a very small, simple-construction, easy-to-handle and high-sensitivity spectrometer. In addition, this spectrometer has several merits; 1)the number of simultaneously detectable elements is increased, 2) the influence of the surface roughness on measurements is very small because all elements are detected under the same conditions with respect to the x-ray take off angle, 3) it should be easy to adapt the spectrometer to μ-XRF, EPMA and SEM.