High-resolution inspection of 2D-microstructures using multi-mode Dolarization microscopy polarization microscopy

摘要

For accurate measurements of structures with sharp edges, as found on photomasks and wafers, polarization methods are useful because edges provide a unique polarization-effect: Depending on geometrical form and material of the edge, its effect on the incident polarization is different. We have developed three different methods for polarization-utilization: a) polarization interferometry, b) Jones-matrix microscopy, and c) quantitative phase-contrast. All three procedures are incorporated into one set-up. We describe the set-up and its measurement modes.