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Ultra-Precise Closed-Loop Piezo Positioning with Interferometry for Nano Manufacturing Machines

机译:用干涉测量器进行超精密闭环压电定位纳米制造机

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摘要

The downscaling reaches nearly every area in our life. Actual technologies are limited and for further improvements in precision new dimensions have to be made available. This trend is visible in multiple industries from microfabrication to precision semiconductor manufacturing machines. Requirements to metrology and drive engineering increases rapidly. attocube develops and produces ultra-precise sensors, drive technologies and combine these technologies together.
机译:令人抵制几乎达到了我们生命中的每个区域。实际技术是有限的,并且可以进一步改进精确的新尺寸。从微型制造到精密半导体制造机的多个行业中,这种趋势是可见的。计量和驱动工程的要求迅速增加。阁楼开发并生产超精密的传感器,驱动技术,并将这些技术结合在一起。

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