ICC silicon microbolometer development program

摘要

Infrared Components Corporation (ICC) recently announced that the company had acquired rights to uncooled microbolometer technology developed at the Defence Science and Technology Organisation (DSTO), Australia. Under the licence agreement DSTO is developing a technology transfer package for implementation in a silicon MEMS foundry. ICC has contracted Electr-optic Sensor Design (EOSD) for FPA design and analysis and local co-ordination of the technology transfer program. ICC has also entered into an agreement with SUNY Albany Center for Advanced Thin Film Technology (ACATFT) to transition the DSTO technology to production. In this paper we outline the microbolometer processing technology and discuss the aims and objectives of the ICC program.