应用二维微硅片狭缝阵列的阿达玛光谱仪

摘要

In order to realize the spectral analysis of a weak signal, a Hadamard spectrometer with a high luminous flux and high resolution is established by using a Offner optical structure in the system. The performance of Hadamard S silt and Hadamard cyclicS silt is compared. Then,the multimicrosiliconslit matrices are produced by MEMS technique,and the diffraction phenomenon is analysed by using the software of Matlab. Based on the diffraction theory, the diffractive formula is presented. A set of experiments are carried out to compare the performance of Hadamard S15 and Hadamard cyclicS15,results show that the luminous flux of the presented device with Hadamard S15 is 1.45 times that of the device with Hadamard cyclic S15.The experiment verifies that the programmer using the Matlab language is reasonable,the measurement system is stable,and the S15 slit is fit for the Hadamard spectrometer.%为了实现对微弱信号的光谱分析,采用Offner光学结构制作了高光通量高分辨率阿达玛光谱仪,并对光谱仪入射狭缝的类型选择进行分析.利用MEMS加工技术制作出阿达玛微硅片狭缝阵列,分析了入射狭缝的衍射现象,推导出衍射后的光强分布公式.采用Matlab软件对光强分布进行仿真,搭建了实验测量平台验证仿真结果.结果显示,在相同的条件下,阿达玛S15型狭缝阵列的光通量是阿达玛循环S15型狭缝阵列的1.45倍,推导得出的衍射光强分布公式正确,仿真方法准确,测试方法合理,表明阿达玛S型微硅片狭缝阵列适合本文设计的光谱仪.