Jale 3D-platform-independent IC/MEMS layout edition tool

摘要

This paper describes the Jale3D, a tool developed as part of the Cave Framework. The main features of the tool are the edition and the visualization of the layout information from both integrated circuits (ICs) and micro-electromechanical systems (MEMS). The use of the Virtual Reality Modeling Language as a way to create 3D models of integrated circuits and MEMS is also presented.