A passive magnetostatic sensing MEMS device, similar to a reed switch, having a packaged volume of 2 mm{sup}3 is described. It is capable of sensing the field of a 1 mm{sup}3 SmCo magnet at a distance of more than 2 mm. The contact force between the micro-formed rhodium contact surfaces lies between 10 and 30 μN, and contact resistances as low as 2 Ω are measured. No contact sticking is observed. The device operation life extends to at least 200'000 cycles when packaged at wafer level with epoxy sealing. The device operation life increases to 100×10{sup}6 cycles when measured on bare wafers in argon, showing that these MEMS sensors are intrinsically reliable in spite of the very low contact forces.
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机译：描述了类似于具有封装体积为2mm {sup} 3的簧片开关的被动磁静电感测Mems装置。它能够在大于2mm的距离处感测1 mm {sup} 3 smco磁体的字段。微形成的铑接触表面之间的接触力在于10至30μN，测量低至2Ω的接触电阻。没有观察到接触粘贴。在具有环氧密封的晶片水平下封装时，器件操作寿命延伸至至少2007000个循环。当在氩气中的裸晶片上测量时，器件操作寿命增加到100×10 {sup} 6周期，表明这些MEMS传感器尽管接触力非常低，但是在本质上可靠。
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