A new ferroelectrics-silicon integrated microphone and microspeaker is proposed. The Pt/Pb(Zr,Ti)O/sub 3//Pt/SiO/sub 2//Si/sub 3/N/sub 4/ cantilever structure is designed theoretically using multimorph model. The sensitivity and the sound pressure level (SPL) of the integrated microphone and microspeaker are calculated. It is found that the sensitivity of the microphone and the SPL of the microspeaker are very high. The new integrated microphone and microspeaker will be valuable for high quality micro-acoustic devices.
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机译：提出了一种新的铁电 - 硅集成麦克风和微空座机。 Pt / Pb（Zr，Ti）O / Sub 3 // Pt / SiO / Sub 2 // Si / Sub 3 / N / Sub 4 /悬臂结构在理论上使用多数电偶模型设计。计算集成麦克风和微空座机的灵敏度和声压级（SPL）。发现麦克风的灵敏度和微型座位的SEC非常高。新的集成麦克风和微型抖动对于高品质的微声器件将有价值。
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