Low temperature deposition of SBT thin films using modified sol-gel solutions

摘要

SBT thin films were successfully deposited at low temperature by using modified sol-gel solutions. The solution was prepared from triple complex alkoxide, which was synthesized by optimizing organic ligands for low temperature decomposition. The solution was pyrolysed perfectly at much lower temperature than conventional MOD solution. The temperature was about 340/spl deg/C. SBT thin films deposited from modified SBT solutions were compared with that from conventional MOD solution. The results suggested that the modified SBT sol-gel solution was more effective for low temperature deposition.