Ultra clean process gas recycling system for plasma process using krypton and xenon

摘要

Introduction of rare Kr(Xe) gases into ULSI rnass production requires recycling of exhaust gases strongly. In this paper, we descrlbe gas pumping system that enables efficient recycling of Kr and Xe gases. Newly developed screw pump is able to exhaust without involving atmosphere in its exhaust gases. Moreover, this sccew pump needs a smaller volume of purge gases to realize clean pumping than conventional dry pumps. Novel bellows pump can compress recycle gases without involving atmosphere. These pumping system enables ultra clean process gas recycling system for plasma process using krypton and xenon.