Calibration standards for calibrating and assessing of surface measuring systems down to the nanometric range

摘要

Within the European Research Project SMT4-CT97-2176 "Calibration Standards for Surface Topography Measuring Systems down to Nanometric Range" the limits of production and replication methods for calibration standards with sinewave, triangular arcuate profiles and step height standards (according ISO 5436-1:2000) have been investigated. For 3-D calibration a calibration standard consisting of four- sided pyramidal frustums has been developed and produced by ultra- precision machining. Concerning the application of such standards it will be demonstrated in which way especially standards with sine- wave and arcuate profiles can be used for calibrating stylus and optical Instruments in X-, Y- and Z- direction and which other properties of the instruments can be assessed. Especially sinusoidal calibration standards which now are available in the wave- length range λ= (PSm) = 2.5 μm to 800 μm with Pt-values between 0.2 μm and 30 μm can be used to assess the Influences of the discrimination lengths Δx and Δy, the stylus tip radius, the traversing speed and the filter characteristics on the measuring results.