Ultra-precision manufacturing of calibration standards for surface topography measuring systems

摘要

Due to the high prices of certified calibration standards the calibration of surface topography measuring systems is a very costly procedure. Therefore, the calibration of these systems is often performed by special laboratories such as the German Calibration Service (DKD). It is one of the objectives of the EU-project SMT4-CT97-2176: "Calibration Standards for Surface Topography Measuring Systems down to Nanometric Range" to produce low-priced calibration standards by means of ultra-precise machining and replication processes for a wide range of applications in the market and thus to contribute to quality assurance in the control of measuring systems.