Semiconductor quantum dots are attracting increasing interest because of their significant optoelectronic properties. Of crucial importance are the structural parameters of the quantum dots including shape, size and composition. A lot of research has been done on the shape and size of the quantum dots, but relatively little attention has been paid to the composition. Some qualitative composition results obtained by EDX are reported. In this study, the composition of quantum dots with and without a capping layer is determined quantitatively by energy filtering transmission electron microscopy (EFTEM).
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