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STRUCTURAL AND TRIBOLOG1CAL PROPERTIES OF MOLYBDENUM DISULFIDE/ METAL MULTILAYERED FILMS DEPOSITED BY PULSED LASER DEPOSITION

机译:通过脉冲激光沉积沉积二硫化钼二硫化钼/金属多层薄膜的结构和摩托的薄膜

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The structural, mechanical and tribological properties of MoS_2/metal and MoS_2/carbide multilayer thin films have been examined in this study. The films were deposited by pulsed laser deposition of sequential layers of MoS_2 and either Ti, Cr or TiC. The compositions of the films were analyzed by wavelength dispersive spectroscopy (WDS) and confirmed the presence of the deposited elements. X-ray diffraction and cross-section SEM methods were employed to characterize the films. The XRD results did not reveal the presence of separate Ti, Cr or TiC phases, and the SEM did not show any multilayer structures. From these results, it was concluded that the added metal or carbide elements are present as either a dispersed nano-structured phase or in solid solution with the MoS_2. Nonetheless, friction and wear testing showed dramatic improvements over MoS_2 films when tested in a humid (45% r/h) environment.
机译:本研究研究了MOS_2 /金属和MOS_2 /碳化物多层薄膜的结构,机械和摩擦性质。通过脉冲激光沉积的序列层的MOS_2和Ti,Cr或TiC沉积薄膜。通过波长色散光谱(WDS)分析膜的组合物,并确认沉积元件的存在。使用X射线衍射和横截面SEM方法表征薄膜。 XRD结果没有揭示单独的Ti,Cr或Tic相的存在,并且SEM没有显示任何多层结构。从这些结果中得出结论,添加的金属或碳化物元素作为分散的纳米结构相或用MOS_2的固溶物存在。尽管如此,当在潮湿(45%R / H)环境中测试时,摩擦和磨损测试表现出对MOS_2薄膜的显着改善。

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