Reactive Solid-Phase Epitaxy -A novel growth method for single-crystalline thin films of complex oxides with superlattice structure-

摘要

We have developed a novel growth method for single-crystalline film of natural superlattice oxides and named the method "Reactive Solid-Phase Epitaxy (R-SPE)." Single-crystalline thin films of homologous series In-Ga0_3(ZnO)_m (m=integer) are fabricated by the R-SPE method and its growth mechanism, especially a role of ZnO epitaxial layer, is clarified. High-temperature annealing of bi-layer films consisting of an amorphous InGaO_3(ZnO)_5 layer deposited at room temperature and an epitaxial ZnO layer on YSZ substrate allows for the growth of single-crystalline film with a controlled chemical composition. The ZnO layer plays an essential role in determining the crystallographic orientation, while the thickness ratio between the two layers controls the film composition.