首页> 外文会议>International conference on single crystal growth and heat mass transfer >TIME-DEPENDENT MODELLING OF VACANCY-INTERSTITIAL RECOMBINATION LN CZOHRALSRI SILICON SINGLE CRYSTAL GROWTH
【24h】

TIME-DEPENDENT MODELLING OF VACANCY-INTERSTITIAL RECOMBINATION LN CZOHRALSRI SILICON SINGLE CRYSTAL GROWTH

机译:空位间隙性重组的时间依赖性建模Ln Czohralsri硅单晶生长

获取原文

摘要

Formerly the stationary, two-dimensional model describing the transfer processes and vacancy (v) - interstitial (i) recombination in CZ-growing silicon single crystals was considered in complete statement. For one dimensional case and analytical axial temperature profile in crystal this model was verified in [2] for comparison with fast recombination approximation, Residual vacancy C_v and interstitial C_i concentrations after a recombination were calculated on base of a thermal history of 150 mm diameter silicon single crystals growth in EKZ-2700 hot zone. By using of this data the (C_i -C_v)-distributions of residual concentration differences were plotted and compared with experimental life time maps in a grown crystals. Size of OSF ring in single crystals was analyzed for different crystal pull rate regimes. In this work the time dependent 2D-model of v-i-behaviour during crystal growth is considered for an approximation and for a thermal crystal history, too. Time dependent C = C_i -C_v [cm~(-3)] concentration distributions for different VP pull rate regimes are analyzed, including experimental regimes with the crystal pull rate Vp decreasing for intermediate growth stages (Fig. 1). Calculation results are compared with the experimental life time maps in grown crystals. The comparison with the former stationary model data is given. The suitable of the latter model for an analysis of real crystal structure is discussed.
机译:以前描述转移过程和空缺静止,二维模型(V) - 间质(I)重组在CZ-生长硅单晶中完整陈述了审议。对于一维的情况下和分析轴向温度分布在晶体该模型中证实[2]用于与快速重组近似比较,残留空位C_v和重组后间质性C_I浓度计算上直径150mm的单晶硅的热历史的基础晶体生长在EKZ-2700的热区。通过使用该数据的(C_I -C_v)的残余浓度差异-distributions的作图,并与实验寿命时间在生长的晶体相比映射。在单晶OSF环的大小进行了分析不同的晶体上拉速率制度。在这项工作中的时间依赖的V-I-行为晶体生长过程中的2D模型被认为是一个近似和热结晶的历史了。时间依赖的C = C_I -C_v [厘米〜(-3)]为不同VP提拉速度制度浓度分布进行分析,其中包括与晶体提拉速度VP减小为中间生长阶段(图1)实验制度。计算结果与生长的结晶实验续航时间比较图。与前固定模型数据的比较中给出。的适合于实时的晶体结构的分析后一种模式的讨论。

著录项

相似文献

  • 外文文献
  • 中文文献
  • 专利
获取原文

客服邮箱:kefu@zhangqiaokeyan.com

京公网安备:11010802029741号 ICP备案号:京ICP备15016152号-6 六维联合信息科技 (北京) 有限公司©版权所有
  • 客服微信

  • 服务号