Confocal microscopy, which has unique properties such as resolution and depth sectioning, has become a popular imaging technique especially to examine the integrated circuits, machined parts and micro-electromechanical systems (MEMS). The instrument was invented by M.Minsky in 1955 [1] and following development occurred in 1980s. Today, with the support of new state-of-art devices like DMD~(TM) (Digital Micromirror Device), it continues to develop. Within an EC funded project, we develop a new type of confocal microscope (Microscan), with a scanning range of 10×10×5 mm to 10×10×5 μm and with a resolution of respectively 1 μm to 10 nm, using a DMD~(TM) to improve the performance of classical confocal microscopes. In this paper we will mainly deal with the optical and mechanical aspects of the designed microscope.
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