Micromachined experimental structure for optimization of multilayer p{sup}+Si/(metal, semiconductor) thermopile IR detectors and thermal converters

摘要

This paper presents the design and fabrication technique of a test structure with p{sup}+Si/metal and p{sup}+Si/sputtered-Si thermopiles intended for optimization of performance of multilayer thermopile IR detectors and thermal converter. Au experimental structure is fabricated using micromachining techniques.