A novel bi-directional magnetic microactuator using electroplated permanent magnet arrays with vertical anisotropy

摘要

A novel bi-directional magnetic microactuator using electroplated permanent magnet arrays has been fabricated and tested in this work. To realize the microactuator, a new electroplating technique has been developed to improve vertical magnetic anisotropy in CoNiMnP-based permanent magnet arrays. By applying magnetic field during electroplating, vertical coercivity and remanence have been increased up to 1100 Oe and 1900 G. After electroplating the magnet arrays at the tip of a prototype silicon cantilever beam, bi-directional magnetic actuation has been successfully achieved by exciting an integrated electromagnet under the beam.