Characterization of multi-parameters of piezoelectric thin films

摘要

Based on two sets of approximate equations deduced from the resonance spectrum of the input electrical impedance of the composite resonator consisted of a thin film deposited on a substrate, the density ρ, stiffed elastic constant C~D_(33), electromechanical coupling constant k~2_t of the film and the elastic constant C_(33) of the substrate can be calculated directly. Then the dielectric constant ε~s_(33) can be calculated from the values of the parameters above and the input impedance at some special resonance frequencies. When ε~s_(33), C~D_(33) and k~2_t, are known, piezoelectric constant h_(33) can be obtained. The accuracy of the method is checked on two typical samples by numerical simulation.