Piezoelectric thin film, piezoelectric thin film element and target, and piezoelectric thin film and piezoelectric thin film element manufacturing method

摘要

Provided is a piezoelectric thin film that is unlikely to generate a heterogeneous phase and has excellent piezoelectric characteristics. A piezoelectric thin film 3 including a composition represented by the general formula: (1-n) (K1-xNax) mNbO3-nCaTiO3, wherein m, n, and x in the general formula are 0.87 ≦ m ≦ 0. 97, piezoelectric thin film 3 in the range of 0 ≦ n ≦ 0.065 and 0 ≦ x ≦ 1.