Pad life optimization by characterization of a fundamental pad-disk interaction property

摘要

The ability of diamond disk pad conditioning to deliver consistent pad surface properties is governed by several factors. Typically, the size, shape, density of diamonds and amount of protrusion of diamonds on a conditioning disk dictate the polishing characteristics in oxide polishing. While global under-conditioning normally manifests itself as an unstable process, over-conditioning leads to excessive pad wear and hece short pad life and higher Cost of Ownership (CoO). In an effort to optimize pad life, a study was undertaken to understand the interaction between various variables that characterize the diamond disk and pad wear rate. In addition to the above mentioned diamond characteristics, realtive abrasive sharpness (RAS) was identified as a measure of the efficiency/effectiveness of conditioning. This metric is a function of the friction force between the diamond disk and the pad material. A method to gauge the RAS of a pad conditioner was developed. RAS values were obtained for a large number of standard production pad conditioning disks. The RAS values showed a strong correlation with pad wear rate.