Electron-optical properties of electrostatic immersion objective

摘要

Long foucs electrostatic objects of simplest geometry with plane cathode has been investigated. main feature of the immersion objective is telescopic mdoe and its linear magnification is almost constant in wide range of electrode potential changing. The spherical and chromatical aberration dependence on electrodes potential was studing. he results can be useful for optimization of geometrical size of low-voltage immersion objectives and for quick valuation of electron optical properties of immersion lens.