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Electrostatic immersion objective lens

机译:静电浸没物镜

摘要

1,025,674. Emission microscopes. TRUB TAUBER & CO. A.G. Nov. 13, 1962 [Nov. 22, 1961], No. 42812/62. Heading H1D. An electrostatic immersion objective for an emission microscope comprises an emitter electrode K, an intermediate electrode Z, a control electrode S and an accelerating electrode A, the bore in the intermediate electrode Z having a diameter D z and an axial length z, each of which is at most one fifth of the distance a between emitter K and electrode Z. In a preferred arrangement, a is 3 mm., z is 0À25 mm. and D z is 0À3 mm., so that the field between cathode K and electrode Z stays homogeneous until near the bore, and the beam almost immediately afterwards enters the field of the Einzel lens Z-S-A, electrode Z being at the same potential as anode A, and the control electrode potential being variable and less than a tenth of the anode potential relative to the cathode. The bore in electrode Z is chosen to restrict the image at the smallest magnification used, and may be funnel-shaped with its narrow part adjacent the cathode and may have rounded edges. One or more of the electrodes may be adjustably mounted for transverse displacement or relative inclination to compensate astigmatism due to lack of rotational symmetry in the bore of electrode z. An apertured screen B may be provided beyond anode A. After passing the objective, beam electrons may be deflected by a magnetic field so that negative ions alone are used for image formation. Also the polarity of the electrode potentials may be reversed for image formation with positive ions.
机译:1,025,674。发射显微镜。 TRUB TAUBER&CO。A.G. 1962年11月13日[十一月1961年第22期],第42812/62号。标题H1D。用于发射显微镜的静电浸没物镜包括发射电极K,中间电极Z,控制电极S和加速电极A,中间电极Z中的孔具有直径D z和轴向长度z,每一个的直径发射器K和电极Z之间的距离a最大为五分之一。在优选的布置中,a为3mm。z为0-25mm。并且D z为0‑3 mm。,因此阴极K和电极Z之间的场保持均匀,直到靠近孔为止,并且光束几乎立即进入Einzel透镜ZSA的场,电极Z与阳极A的电位相同,并且控制电极电位是可变的,并且相对于阴极小于阳极电位的十分之一。选择电极Z中的孔以使用最小的放大倍数限制图像,并且可以是漏斗形的,其狭窄部分靠近阴极,并且可以具有倒圆的边缘。电极中的一个或多个可被可调节地安装以用于横向位移或相对倾斜以补偿由于电极z的孔中缺乏旋转对称性而引起的像散。可以在阳极A的上方设置一个有孔的屏幕B。通过物镜后,束电子可能会被磁场偏转,从而使负离子单独用于成像。同样,电极电位的极性可以颠倒,以用于用正离子形成图像。

著录项

  • 公开/公告号GB1025674A

    专利类型

  • 公开/公告日1966-04-14

    原文格式PDF

  • 申请/专利权人 TRUBTAUBER & CO. A.G.;

    申请/专利号GB19620042812

  • 发明设计人

    申请日1962-11-13

  • 分类号H01J37/12;H01J37/285;

  • 国家 GB

  • 入库时间 2022-08-23 14:44:49

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