The Effect of Stress on Silicon Oxynitride Optical Waveguides

摘要

An integrated optical demultiplexer is an ideal device for the measurement of the effect of strain (or, equivalently, stress) on birefringence. We fabricated optical demultiplexers from silicon oxynitride optical waveguides and measured the strain dependence of the passband wavelengths. From the shift in the passband wavelenght, we determined the strain dependence of the effective index for the silicon oxynitride waveguide.