Optical Coherence Tomography by Spatio-Temporal Joint Transform Correlator

摘要

All optical and one dimensional scanning surface measurement system is constructed. The system uses the principle of spectral interference and optical Fourier transform, or the principle of joint transform correlator. It can determine the three dimensional surface of an object in the accuracy of few 10mum. As a first demonstration, path-length difference of a Michelson interferometer is measured. Next, the surface of an object which has stepped surface is measured.