Copper cluster formation and evolution in amorphous materials grown by co-spluttering of copper with SiO{sub}2

摘要

The process of copper nanoclusters evolution in amorphous films, formed by co-sputtering of Cu and SiO{sub}2, has been investigated theoretically. Bulk copper diffusion during sample annealing after fabrication have been described by kinetic equation set and cluster size distribution function have been obtained. The reasonable agreement of theoretical and experimental results has been achieved. The values of bulk copper activation migration energy have been estimated. For investigating clusters formation with different copper content method of molecular dynamics have been developed. Both methods have reasonable agreement for low time diffusion.