Design, fabrication and perform ance of a novel microminiature 2-22GHz high performance 11.25 deg MMIC phase shifter with compatible different control signals and either analogue or digital control is described. High performance (low peak phase error:<=1.5deg, low VSWR:<=1.5, low insertion loss variations:<=1.3+-0.5dB over 2 to 22GHz frequency range) and the small size(1.2mmX0.32mmX0.1mm) are exhibited.
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