We propose a novel non-contact micro sensor to measure distance. The sensor is composed of a point light source and a photo detector placed on a micro vibrator. The distance between the sensor and an object is obtained by the ratio of the detected light intensity and the amplitude of the intensity alternation by the vibration. It is applicable to both scattering and mirrorlike object, and stable against the dirt and the sensitivity fluctuation of the detector. We expect wide range of its applications from medical treatment to new type of computer interface, such as a proximity sensor of micro catheter in non-invasive surgery, and a tongue motion sensor. The principle and the results of basic experiments are shown.
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